Semiconductor Process Glove Box

Controlled Atmosphere Systems

For wafers, sensitive materials, thin-film processes and device packaging

Semiconductor-Compatible Glove Box Systems

Standard and configurable systems for air-sensitive materials and controlled process integration

Accessory Series

Analyzers, vacuum components, feedthroughs and laboratory process accessories

Customized Solution

Chambers, transfer systems and equipment interfaces configured around your process
Microscope glovebox
Class-100 clean glovebox
Custom oven glovebox
Custom low-temperature cold-trap glove
Custom oven glovebox
Lithium battery integrated glovebox
lithium battery automated assembly production line
Supercapacitor
Supercapacitor
Supercapacitor
Vacuum-chamber liquid injection
Pouch cell electrolyte filling
Spin-rolling sealing

Technical parameters
Chamber dimensions: glovebox configured according to the electrolyte-filling machine
Material: full stainless-steel construction(Type 304), surface metal brushing process; thickness 3 mm
Control system: includes self-diagnosis and power-failure auto-restart features, with pressure control and adaptive functions
Automatic control, circulation control, password protection; vacuum chamber control uses LCD display
The control unit uses German Siemens PLC with touchscreen operation
Rated power: 2.0 kW
Working gas pressure: 0.4–0.6 MPa
Purification capability: O₂< 0.1 ppm, H₂O< 0.1 ppm(dew point< −78 °C)
Menu options: Chinese/ English

Technical parameters
Solved the problem of large volume sealing in 3D printed glove boxes.
Solved the problem of high integration of signal and power lines in 3D printed glove boxes and external sealing and anti-interference.
Solved the problem of smoke and dust purification during the operation of 3D printed glove boxes, as well as the issue of filter replacement cycle and lifespan.
Humanized and professional design, the appearance of the box is beautiful, the sealing of the large door on the box is excellent, and it is easy and simple to open.
Solved the problem of powder feeding air intake or powder spreading equipment lens blowing and glove box pressure control for 3D printing glove box powder feeders.

WHY CHOOSE ETELUX ?

For semiconductor materials and device workflows, Etelux reviews inert-atmosphere requirements, transfer methods and equipment interfaces before defining a glove box configuration.

Scientific Glove Box Manufacturing

Etelux manufactures inert-gas glove box systems for scientific laboratories and controlled manufacturing. Our systems support semiconductor materials, battery research, thin-film processes, chemistry and other oxygen- and moisture-sensitive applications, backed by large-scale production and application engineering capabilities.

Process-Matched Engineering

Configure chamber layout, glove ports, transfer antechambers, purification and equipment interfaces around the material flow and process requirements.

Application Support

Etelux supports system selection, process integration, installation and operation for laboratory and controlled-production environments.

Controlled Integration

Connect coating, deposition, transfer or packaging equipment while maintaining the controlled inert atmosphere required by sensitive materials.